PLC Rotary Table Surface Grinders for Silicon, Quartz and Silicon Carbide

Blanchard Style Spindle Rotary Table Surface Grinder with < 3㎛ Flatness and Parallelism for Quartz, Ceramic and SiC

As a recognized grinding machine provider to companies in the semiconductor industry and high-precision fabrication business, we manufacture PLC controlled rotary table surface grinders in both horizontal and vertical spindle type. Our grinders are built on iron beds for absolute rigidity and sturdiness against vibration. They are equipped with spindles imbedded with hydrostatic metal bearing, and a box way slide system that utilizes scraping techniques for superior precision and service life.

 

With a flatness and parallelism tolerance of <3㎛, our rotary table grinders are designed to meet surface roughness requirement for clients in semiconductor, battery and high precision machine manufacturing industries. Since 2006, we have been supplying horizontal and vertical spindle rotary table surface grinders to global leaders of semiconductor technology.

Blanchard Style Horizontal Spindle Rotary Table Surface Grinders

By applying scraping techniques to the rotary table slide and the box way of the rotary table grinders we achieve a rigidity of near 0 mm, as well as flatness and parallelism against vibration. Our excellent scraping techniques are the results of decades of craftmanship and experience as a leading manufacturer of rotary table grinding machines with horizonal or vertical axis spindles.

 

All our grinders have automatic lubrication and wheel dressing systems, automatic balancer for the spindle, and an HMI touch-screen control panel.

 

PLC Rotary Table Surface Grinders with Horizonal Spindle

PDF IconRotary Surface Grinding System for Bioceramics Business Case

 

Our horizontal spindle rotary table surface grinders are available in both ram type and column type. Most of our clients use our column type horizonal spindle rotary table surface grinders, which can operate up to 450mm in height with a table diameter from 800 mm to 3,000 mm. The ram type grinders can operate up to 120mm in height with a table diameter range from 400 mm to 600 mm. Both types of grinders have a tolerance of <3㎛ for flatness and alignment of spindle shaft, table surface and table plane.

PLC-HMI Horizontal Spindle Rotary Table Grinder in Ram Type
H600 Model – Horizonal Spindle Rotary Table Surface Grinder System
PLC-HMI Horizontal Spindle Rotary Table Grinder in Column Type
PLC-HMI Horizontal Spindle Rotary Table Grinder in Column Type

All our horizontal spindle grinders have hydrostatic metal bearings in the spindle structure to ensure durability of bearing life against heat deformity and vibration. As a result, our horizontal grinders are an excellent choice for either rough grinding, which generates a lot of heat and vibration, or highly precise surface grinding, which demands absolute flatness and parallelism.

Hydrostatic Metal Bearing Spindle Structure
Hydrostatic Metal Bearing Spindle Structure

Technical Data of Rotating Table Surface Grinding Machine with Horizontal Spindle

Technical Data of Rotating Table Surface Grinding Machine Horizontal Spindle

Scraping Applied to Rotary Table Slide and Box Ways for Table Surface Rigidity

Most other rotary table surface grinder manufacturers use conventional thrust roller bearings for their rotary table slide. Thrust roller bearings deliver inferior precision, as well as shorter service life due to their low resistance against wear and tear from prolonged use. As a result, grinders that use thrust roller bearings also require frequent repairs and replacements of the bearings.

 

As a superior alternative, our table slides use metal rings that are processed with our scraping techniques and fabricated with grooves for the lubricant oil. This technique delivers table surface rigidity against vibration to nearly 0 mm with sustained performance for an extended period, which reduces the need for regular maintenance.

 

Scraping technique is also applied to our box way of x-axis transfer slide to achieve superior parallelism and flatness of table surface. This differs from the LM-guide way for the x-axis that is widely used by other manufacturers. LM-guide ways have a transfer precision of roughly 0.005mm to 0.01mm on the grinder’s wheels and table and are unable to deliver high precision level. Moreover, the LM-guide requires frequent maintenance to adjust for the LM-guide’s loosened balls. By using our scraping techniques, LPR Global’s box way overcomes these shortcoming to deliver a <3transfer precision of table and wheel and maintain high precision levels for an extended service life.

Silicon and Ceramic Surface Grinding Machine References for Semiconductor and Bioceramics Applications

PDF IconRotary Surface Grinder Reference List (2020-2021)

Blanchard Style Vertical Spindle Grinders

Our vertical spindle rotary table surface grinders are favoured by clients over competing brands for applications in grinding semiconductor materials such as quartz, ceramic, silicon and SiC.

 

PDF IconRotating Surface Grinding Process for Silicon Carbide for Aerospace Mirror Business Case

 

Unlike metal surfaces, which can be ground by stone, these semiconductor materials require diamond-coated wheels for grinding. A common issue of vertical spindle rotary grinders is a transfer error (< 5 micron) in the z-axis occurs after a year of use. Z-axis errors are a critical problem for the semiconductor industry because such errors can cause damage or destruction of semiconductor components during grinding with the diamond wheel.

 

Our vertical spindle grinders are designed to prevent z-axis errors by addressing the cause of the error. First, our machines have a balance weight on the ball screw, and they use a combination of flat slide and LM-guide for box way. Second, they also have a z-axis slide installed outside of the main cover of grinding chamber. As a result, our vertical spindle grinders sustain the same tolerance rate over extended periods, and they can automatically adjust grinding amount on the scale of 1 micron.

Vertical rotating surface grinding system for ceramics and silicon carbide
Vertical rotating surface grinding system for ceramics and silicon carbide
Vertical Spindle Rotating Table Surface Grinding System
Vertical Spindle Rotating Table Surface Grinding System
Vertical Spindle Rotary Surface Grinding Machine with Z-Axis Outside the Chamber
Vertical Spindle Rotary Surface Grinding Machine with Z-Axis Outside the Chamber

Main Applications: Semiconductor, Solar Energy, Battery, Tool Making, Steel Fabrication, and Medical

A z-axis slide installed outside of the chamber
z-axis slide installed outside of the chamber

Technical Data of Rotary Table Surface Grinding Machine with Vertical Spindle

Technical Data of Rotary Table Surface Grinding Machine with Vertical Spindle

Horizontal and Vertical Spindle Rotary Table Surface Grinder Video

Grinder Spindle Shaft Video

Bioceramics – Rotary Table Surface Grinding System

PDF IconRotary Surface Grinding System for Bioceramics Business Case

 

Rotary surface grinding is a fast and precise solution when a flat surface is required on ceramics, silicon, glass, quartz, and silicon carbide (SiC), and other materials. Our rotary table surface grinding machines are specifically designed to meet strict tolerance and precision grinding requirements for our clients in semiconductor, medical, and optic industries.

 

PDF IconRotary Surface Grinder Reference List (2020-2021)

 

A global bioceramics manufacturer in the U.S. was looking for a rotating table surface grinder to machine their bioceramics materials. As the materials are used in bioimplantable devices and orthopaedic components, a key priority was to use high purity and high strength ceramics material for biocompatibility.

 

To meet this requirement, the client was looking for surface grinding machines with the following features:

  • Rugged steel weldment base with hand-scraped steel box ways for vibration dampening
  • Capacity to hold <3㎛ flatness and parallelism
  • Automatic grinding wheel dresser
  • Hydrostatic metal bearings in the spindle structure for durability
  • HMI touch screen controlled
  • Inverter driven spindle movement
  • Magnetic chuck
  • Durable steel weldment column design

 

Our horizontal rotating surface grinder model H600 was the perfect choice. The client was most impressed with the H600’s magnetic chuck design, which simplifies maintenance and reduces downtime.

Moreover, our HMI touch screen and user-friendly interface make our surface grinders easier to operate. For the client, this helps control for product quality by lowering the expertise and training required for each employee, while maintaining consistent grinding quality.

 

H600 Rotary Table Surface Grinder Advantages

  1. Our experience allows us to provide customized jigs and fixtures, no matter how small your workpiece sizes
  2. The magnetic chuck is energized and de-energized by a controller that minimizes heat-related impact on the chuck life
  3. Excellent combination of grinding wheel speed and spindle drive horsepower
  4. Servo-linear axes for the carriage X-Axis and the spindle head Z-Axis for precise movement
PLC-HMI Horizontal Spindle Rotary Table Grinder in Ram Type
H600 Model – Horizonal Spindle Rotary Table Surface Grinder System

Technical Data for H600 Rotary Table Surface Grinder

Technical Data of Rotating Table Surface Grinding Machine with Horizontal Spindle

Please check our “Videos tab” for a video of H600’s design and movement.

Silicon Carbide for Aerospace Mirror – Rotary Table Surface Grinding System

PDF IconRotating Surface Grinding Process for Silicon Carbide for Aerospace Mirror Business Case

 

Engineered ceramics used in the aerospace and defence industry must be able to withstand harsh environments and extreme conditions. Our long-term client has been supplying engineered ceramics to the aerospace and defence industry for many applications, including aerospace, armor, and optical components. For years, they have been using our rotary table surface grinders, vertical model V1000 and horizontal model H600, to guarantee their grinding quality.

 

Our client first purchased our grinders in 2020 to machine silicon carbide and ceramic mirror systems for aerospace imaging and sensing systems. Silicon carbide’s high stiffness, low mass, and thermal stability were critically important material properties for the optic systems’ performance. After achieving enhanced quality from the silicon carbide and ceramic optic components, processed by V1000 and H600 models in 2020, our client increased their purchase of our grinding machines by 5x in the following year.

Vertical Spindle Rotating Table Surface Grinding System

LPR Global Surface Grinder Advantages

For our client, one of the greatest advantages of working with us is that we offer many options for grinding wheels, spindle drive horsepower, and custom jigs such that the resulting grinder is tailored to the client’s specific needs. In terms of machine performance, our client continues to choose our surface grinders for its precise movement of the X-Axis carriage and the Z-Axis spindle head controlled by a servo-linear system.

 

According to the client, our structural design sets our surface grinders apart from others; the structure design has sustained precise flatness and parallelism of the rotating surface table over multiple years.  Our table slides use metal rings instead of thrust roller bearings, which are used in most other machines. Our design delivers nearly 0mm table surface rigidity against vibration with sustained performance for an extended period. Furthermore, the box way is processed with scraping technique to achieve superior parallelism and flatness of table surface.

Technical Data for Vertical Spindle Rotary Table Surface Grinder Systems – V600, V800, V1000

Vertical Spindle Rotary Table Surface Grinder System Models V600, V800, V1000 and Specifications

Technical Data for Large Vertical Spindle Rotary Table Surface Grinder Systems – V1200, V1500, V1800

Technical Data for Large Vertical Spindle Rotary Table Surface Grinder System Specifications for V1200, V1500, V1800 Models

Please check our “Videos tab” for a video of our vertical spindle surface grinder systems’ design and movement.

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